Comparison of different sensor thicknesses and substrate materials for the monolithic small collection-electrode technology demonstrator CLICTD

Small collection-electrode monolithic CMOS sensors profit from a high signal-to-noise ratio and small power consumption, but have limited active sensor volume due to the fabrication process based on thin high-resistivity epitaxial layers. In this paper, depth is investigated in technology demonstrator CLICTD. Charged particle beams are used study charge-collection properties performance of devices with different thicknesses both for perpendicular inclined incidence. Czochralski substrate, sensitive found increase by factor two comparison standard material leads significant improvements hit-detection efficiency spatial time resolution.